Micro Nano Technologies (MNT) including MicroElectroMechanical Systems (MEMS), MicroOptoElectroMechanical Systems (MOEMS), and Microfluidic Systems may arguably be viewed as the next-generation technologies capable of enabling unique and unprecedented capability and performance as sensors and actuators. Consequently, these new machines and devices are finding application in an array of economic sectors, including automotive, aerospace, telecommunication, healthcare and biotechnology. Some of the current products that are based on these technologies include accelerometers for airbag deployment, digital light processors for high definition video projection and inkjet heads for inkjet printers. Emerging products include DNA analysis tools and portable diagnostic systems for bedside care, light modulators for telecommunications, robotic sensors and manipulators, microscopy tools and chip scale atomic clocks.

Developers of these technologies still struggle in fabricating highly accurate and reliable products because of a lack of adequate metrology. Some of these issues include the need for improvements in static and dynamic performance testing, and the development of reliability and compatibility test methods for the thin-film materials. The need for international standards is also prevalent and the US must take a leadership role in order to ensure that the US can be competitive on the world market.
Definition of US Measurement System needs for Micro Nano Technologies will start with drawing on results of previous workshops followed by networking with partners in industry, industry groups, universities, and other government labs to develop a draft report. The draft report will be delivered in advance of the USMS workshop to the participants and others.

The feedback on the report will be collected at the workshop and by email correspondence, and in ongoing workshops (e.g. microTAS, Nov 2005) to form the first "living" report on MNT metrology needs. This report will be delivered to the NIST USMS committee. An additional outcome of this effort that is in discussion will be the development of an MNT metrology roadmap that will be used by our industry partners.

Carlos Grinspon, ATP, 301-975-4448, carlos.grinspon@nist.gov

Michael Gaitan, Semiconductor Electronics Division, 301-975-2070, michael.gaitan@nist.gov